This work introduces a mixed‐transducer micro‐origami to achieve efficient vibration, controllable motion, and decoupled sensing. Existing micro‐origami systems tend to have only one type of transducer (actuator/sensor), which limits their versatility and functionality because any given transducer system has a narrow range of advantageous working conditions. However, it is possible to harness the benefit of different micro‐transducer systems to enhance the performance of functional micro‐origami. More specifically, this work introduces a micro‐origami system that can integrate the advantages of three transducer systems: strained morph (SM) systems, polymer based electro‐thermal (ET) systems, and thin‐film lead zirconate titanate (PZT) systems. A versatile photolithography fabrication process is introduced to build this mixed‐transducer micro‐origami system, and their performance is investigated through experiments and simulation models. This work shows that mixed‐transducer micro‐origami can achieve power efficient vibration with high frequency, large vibration ranges, and little degradation; can produce decoupled folding motion with good controllability; and can accomplish simultaneous sensing and actuation to detect and interact with external environments and small‐scale samples. The superior performance of mixed‐transducer micro‐origami systems makes them promising tools for micro‐manipulation, micro‐assembly, biomedical probes, self‐sensing metamaterials, and more.

中文翻译：

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用于高效运动和解耦传感的混合传感器微折纸

这项工作引入了一种混合传感器微折纸来实现高效振动、可控运动和解耦传感。现有的微折纸系统往往只有一种类型的传感器（执行器/传感器），这限制了它们的多功能性和功能性，因为任何给定的传感器系统的有利工作条件范围都很窄。然而，可以利用不同微传感器系统的优势来增强功能性微折纸的性能。更具体地说，这项工作介绍了一种微折纸系统，它可以集成三种换能器系统的优点：应变变形（SM）系统、基于聚合物的电热（ET）系统和薄膜锆钛酸铅（PZT）系统。引入了多功能光刻制造工艺来构建这种混合换能器微折纸系统，并通过实验和模拟模型研究了其性能。这项工作表明，混合换能器微折纸可以实现高频、大振动范围和很少退化的高效节能振动；可产生解耦的折叠运动，可控性好；并且可以实现同步传感和驱动，以检测外部环境和小规模样本并与之交互。混合换能器微折纸系统的卓越性能使其成为微操作、微组装、生物医学探针、自感知超材料等领域有前途的工具。