THz photomixing using photoconductive antenna at ... - BATOP GmbH
THz photomixing using photoconductive antenna at ... - BATOP GmbH
THz photomixing using photoconductive antenna at ... - BATOP GmbH
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1/14 Instruction manual PCA-44-06-10-800-x<br />
<strong>BATOP</strong> <strong>GmbH</strong><br />
Wildenbruchstraße 15<br />
D-07745 Jena<br />
Instruction manual and d<strong>at</strong>a sheet PCA-44-06-10-800-x<br />
Photoconductive <strong>THz</strong> <strong>antenna</strong> for laser excit<strong>at</strong>ion wavelengths λ ~ 500 nm … 850 nm<br />
PCA – Photocconductive Antenna<br />
Tel: +49 3641 634009 - 0<br />
Fax: +49 3641 634009 - 20<br />
E-mail: info@b<strong>at</strong>op.de<br />
http://www.b<strong>at</strong>op.de/<br />
PCA-44-06-10-800-0 - unmounted <strong>antenna</strong> chip 2 mm x 2 mm with 4 bond contact pads<br />
PCA-44-06-10-800-h - mounted <strong>antenna</strong> on hyperhemispherical silicon substr<strong>at</strong>e lens<br />
Table of contents:<br />
1. PCA applic<strong>at</strong>ions .............................................................................................................2<br />
2. Antenna design................................................................................................................2<br />
3. Antenna parameters ........................................................................................................3<br />
4. Mounted PCA on hyperhemispherical silicon substr<strong>at</strong>e lens...........................................5<br />
5. Instructions for use of the PCA-44-06-10-800-h..............................................................7<br />
6. Time-domain measurements...........................................................................................9<br />
7. Photomixing measurements ..........................................................................................10<br />
8. Order inform<strong>at</strong>ion...........................................................................................................14<br />
Deutsche Bank Jena<br />
Bank Code: 82070024<br />
Account No: 3922655<br />
Germany IBAN: DE49 8207 0024 0392 2655 00<br />
VAT Reg. No: DE 813698804<br />
Tax Acc. No: 161/106/02514<br />
Local Court Jena HRB 112769
2/14 Instruction manual PCA-44-06-10-800-x<br />
1. PCA applic<strong>at</strong>ions<br />
The PCA can be used as terahertz (<strong>THz</strong>) emitter or detector in pulsed laser g<strong>at</strong>ed broadband <strong>THz</strong><br />
measurement systems for time-domain spectroscopy and as <strong>photomixing</strong> emitter or detector in tunable<br />
cw <strong>THz</strong> measurement systems in the frequency region from 0.1 to 3 <strong>THz</strong>.<br />
Main PCA d<strong>at</strong>a<br />
200<br />
2. Antenna design<br />
300<br />
PCA<br />
44-06-10<br />
001<br />
2000<br />
<strong>BATOP</strong> <strong>GmbH</strong><br />
Wildenbruchstraße 15<br />
D-07745 Jena<br />
• Laser excit<strong>at</strong>ion wavelength λ ~ 800 nm<br />
• Antenna resonance frequency 1 <strong>THz</strong><br />
350 300<br />
2000<br />
all dimensions in micrometers<br />
Photo PCA 44-06-10 (survey) Photo PCA 44-06-100 Photo PCA 44-06-10 (detail)<br />
Tel: +49 3641 634009 - 0<br />
Fax: +49 3641 634009 - 20<br />
E-mail: info@b<strong>at</strong>op.de<br />
Dielectric cover<br />
Deutsche Bank Jena<br />
Bank Code: 82070024<br />
Account No: 3922655<br />
Germany IBAN: DE49 8207 0024 0392 2655 00<br />
10<br />
100<br />
6<br />
44<br />
VAT Reg. No: DE 813698804<br />
Tax Acc. No: 161/106/02514<br />
Local Court Jena HRB 112769
3/14 Instruction manual PCA-44-06-10-800-x<br />
3. Antenna parameters<br />
Electrical parameters minimum r<strong>at</strong>ings standard maximum r<strong>at</strong>ings<br />
Dark resistance 20 MΩ 25 MΩ 30 MΩ<br />
Dark current @ 10 V 300 nA 400 nA 500 nA<br />
Voltage 20 V 30V<br />
Dark current voltage characteristic <strong>at</strong> T = 300 K<br />
Current (μA)<br />
<strong>BATOP</strong> <strong>GmbH</strong><br />
Wildenbruchstraße 15<br />
D-07745 Jena<br />
2,0<br />
1,5<br />
1,0<br />
0,5<br />
PCA 44-06-10<br />
JAM 373<br />
0,0<br />
0 10 20 30 40 50<br />
Tel: +49 3641 634009 - 0<br />
Fax: +49 3641 634009 - 20<br />
E-mail: info@b<strong>at</strong>op.de<br />
Voltage (V)<br />
Optical excit<strong>at</strong>ion parameters minimum r<strong>at</strong>ings standard maximum r<strong>at</strong>ings<br />
Excit<strong>at</strong>ion laser wavelength 500 nm 800 nm 850 nm<br />
Optical reflectance @ 1040 nm 7 % @ 500 nm 5 % @ 800 nm 7 % @ 850 nm<br />
Optical mean power 30 mW 80 mW<br />
Optical mean power density 100 kW/cm 2<br />
Carrier recovery time 400 fs<br />
Deutsche Bank Jena<br />
Bank Code: 82070024<br />
Account No: 3922655<br />
Germany IBAN: DE49 8207 0024 0392 2655 00<br />
200 kW/cm 2<br />
VAT Reg. No: DE 813698804<br />
Tax Acc. No: 161/106/02514<br />
Local Court Jena HRB 112769
4/14 Instruction manual PCA-44-06-10-800-x<br />
Spectral reflectance<br />
Illumin<strong>at</strong>ion dependent resistance R<br />
<strong>BATOP</strong> <strong>GmbH</strong><br />
Wildenbruchstraße 15<br />
D-07745 Jena<br />
Reflection (%)<br />
25<br />
20<br />
15<br />
10<br />
5<br />
0<br />
400 500 600 700 800 900 1000 1100<br />
Wavelength (nm)<br />
GaAs 0° + 0,166Si + 0,697Ta @ 650nm<br />
Tel: +49 3641 634009 - 0<br />
Fax: +49 3641 634009 - 20<br />
E-mail: info@b<strong>at</strong>op.de<br />
Deutsche Bank Jena<br />
Bank Code: 82070024<br />
Account No: 3922655<br />
Germany IBAN: DE49 8207 0024 0392 2655 00<br />
VAT Reg. No: DE 813698804<br />
Tax Acc. No: 161/106/02514<br />
Local Court Jena HRB 112769
5/14 Instruction manual PCA-44-06-10-800-x<br />
4. Mounted PCA on hyperhemispherical silicon substr<strong>at</strong>e lens<br />
Photoconductive <strong>antenna</strong> substr<strong>at</strong>e semi-insul<strong>at</strong>ing GaAs<br />
<strong>BATOP</strong> <strong>GmbH</strong><br />
Wildenbruchstraße 15<br />
D-07745 Jena<br />
chip area 2 mm x 2mm<br />
thickness t 650 µm<br />
Hyperhemispherical lens m<strong>at</strong>erial undoped HRFZ-silicon,<br />
specific resistance ρ >10 kΩcm<br />
refractive index n 3.4<br />
diameter 12 mm<br />
height h 7.1 mm<br />
distance d 7.7 mm<br />
Terahertz beam collection angle α 57°<br />
β<br />
divergence angle ß 15°<br />
virtual focus length L 26.4 mm<br />
Tel: +49 3641 634009 - 0<br />
Fax: +49 3641 634009 - 20<br />
E-mail: info@b<strong>at</strong>op.de<br />
PCA<br />
hyperhemispherical Si lens<br />
Deutsche Bank Jena<br />
Bank Code: 82070024<br />
Account No: 3922655<br />
Germany IBAN: DE49 8207 0024 0392 2655 00<br />
L<br />
t<br />
d<br />
h<br />
α<br />
VAT Reg. No: DE 813698804<br />
Tax Acc. No: 161/106/02514<br />
Local Court Jena HRB 112769
6/14 Instruction manual PCA-44-06-10-800-x<br />
Aluminum mount 25.4 mm diameter, 6 mm thick<br />
Coaxial cable type RG178 B/U, impedance 50Ω, capacitance 96pF/m, 1 m long<br />
Connector type BNC<br />
• The PCA chip is optically adjusted and glued on the hyperhemispherical silicon lens with a thermal<br />
conducting glue.<br />
• The silicon lens is fixed on the aluminum mount with a thermal conducting glue.<br />
• The two <strong>antenna</strong> contacts are wire bonded on a printed circuit board, which provides the<br />
connection to a 1m long coaxial cable with BNC or SMA connector<br />
• A central hole in the aluminum mount allows the Terahertz radi<strong>at</strong>ion to escape from the<br />
hyperhemispherical silicon lens<br />
PCA with hyperhemispherical silicon lens, coaxial cable RG 178 and BNC connector<br />
Front view on mounted PCA (laser side) Back view on mounted PCA (<strong>THz</strong> side)<br />
<strong>BATOP</strong> <strong>GmbH</strong><br />
Wildenbruchstraße 15<br />
D-07745 Jena<br />
Tel: +49 3641 634009 - 0<br />
Fax: +49 3641 634009 - 20<br />
E-mail: info@b<strong>at</strong>op.de<br />
Deutsche Bank Jena<br />
Bank Code: 82070024<br />
Account No: 3922655<br />
Germany IBAN: DE49 8207 0024 0392 2655 00<br />
VAT Reg. No: DE 813698804<br />
Tax Acc. No: 161/106/02514<br />
Local Court Jena HRB 112769
7/14 Instruction manual PCA-44-06-10-800-x<br />
5. Instructions for use of the PCA-44-06-10-800-h<br />
The <strong>antenna</strong> can be used as terahertz emitter or detector in pulsed laser g<strong>at</strong>ed broadband <strong>THz</strong><br />
measurement systems for time-domain spectroscopy and as <strong>photomixing</strong> emitter or detector in tunable<br />
cw <strong>THz</strong> measurement systems in the frequency region from 0.1 to 3 <strong>THz</strong> (see schem<strong>at</strong>ics below).<br />
Schem<strong>at</strong>ic of a time-domain spectroscopy setup<br />
Photomixing setup<br />
<strong>BATOP</strong> <strong>GmbH</strong><br />
Wildenbruchstraße 15<br />
D-07745 Jena<br />
Tel: +49 3641 634009 - 0<br />
Fax: +49 3641 634009 - 20<br />
E-mail: info@b<strong>at</strong>op.de<br />
Deutsche Bank Jena<br />
Bank Code: 82070024<br />
Account No: 3922655<br />
Germany IBAN: DE49 8207 0024 0392 2655 00<br />
VAT Reg. No: DE 813698804<br />
Tax Acc. No: 161/106/02514<br />
Local Court Jena HRB 112769
8/14 Instruction manual PCA-44-06-10-800-x<br />
Emitter:<br />
The pulsed laser beam (in case of time domain spectroscopy) or the mixed cw laser beam (in case of<br />
cw <strong>THz</strong> emitter) has to be focussed onto the <strong>antenna</strong> gap <strong>using</strong> an appropri<strong>at</strong>e lens or objective with a<br />
beam diameter of about 6 µm to bridge the <strong>antenna</strong> gap with photo-excited carriers within the<br />
semiconductor. At the same time a voltage U of ~ 20 V (maximum 30 V peak voltage) has to be<br />
supplied on the gap by connecting the BNC connector cable to a voltage source. The recommended<br />
optical mean laser power Popt is 30 mW (maximum 80 mW).<br />
Receiver:<br />
The pulsed laser beam (in case of time domain spectroscopy) or the mixed cw laser beam (in case of<br />
cw <strong>THz</strong> emitter) has to be focussed onto the <strong>antenna</strong> gap <strong>using</strong> an appropri<strong>at</strong>e lens or objective with a<br />
beam diameter of about 6 µm to bridge the <strong>antenna</strong> gap with photo-excited carriers within the<br />
semiconductor. The phase of the laser beam with respect to the beam on the emitter site has to be<br />
adjusted by <strong>using</strong> of an optical delay line in such a way, th<strong>at</strong> the measured value of the <strong>THz</strong> field on<br />
the <strong>antenna</strong> meets a maximum of the optical beam. By changing the phase difference between the<br />
emitter and receiver <strong>antenna</strong> the time-dependent shape of the <strong>THz</strong> field can be measured.<br />
The cable with the BNC connector must be connected with a sensitive electronic current amplifier.<br />
Attention: Please be sure, th<strong>at</strong> the foc<strong>using</strong> lens or the lens mounting parts does not touch the<br />
<strong>antenna</strong> chip or the tiny gold contact wires between the <strong>antenna</strong> chip and the PCB. See figure “front<br />
view on mounted PCA (laser side)” above.<br />
Lock-in detection<br />
Because of the very small detector signal a lock-in detection scheme is recommended. The following<br />
two possibilities for lock-in detection can be used:<br />
• An optical chopper can be used in front of the emitter <strong>antenna</strong> to chop the optical beam with a<br />
frequency ~ 1 kHz. The result is a chopped emitted <strong>THz</strong> signal, which meets the detector<br />
<strong>antenna</strong>. The output of the detector <strong>antenna</strong> is than a chopped current, which can be amplified<br />
<strong>using</strong> an ac amplifier and rectified <strong>using</strong> a standard lock-in system. The disadvantage of this<br />
system is the loss of 50 % of the optical excit<strong>at</strong>ion power on the emitter <strong>antenna</strong>.<br />
• A square wave voltage gener<strong>at</strong>or with an output voltage U of maximum +/- 30 V and a<br />
frequency of some kHz can be used as supply for the emitter <strong>antenna</strong>. The result is an emitted<br />
altern<strong>at</strong>ing <strong>THz</strong> signal, which meets the detector <strong>antenna</strong>. The output of the detector <strong>antenna</strong><br />
is than an altern<strong>at</strong>ing current, which can be amplified <strong>using</strong> an ac amplifier and rectified <strong>using</strong> a<br />
standard lock-in system. This setup is shown in the figures above.<br />
<strong>BATOP</strong> <strong>GmbH</strong><br />
Wildenbruchstraße 15<br />
D-07745 Jena<br />
Tel: +49 3641 634009 - 0<br />
Fax: +49 3641 634009 - 20<br />
E-mail: info@b<strong>at</strong>op.de<br />
Deutsche Bank Jena<br />
Bank Code: 82070024<br />
Account No: 3922655<br />
Germany IBAN: DE49 8207 0024 0392 2655 00<br />
VAT Reg. No: DE 813698804<br />
Tax Acc. No: 161/106/02514<br />
Local Court Jena HRB 112769
9/14 Instruction manual PCA-44-06-10-800-x<br />
Direct voltage detection<br />
If the <strong>THz</strong> signal is large enough, a direct dc voltage detection scheme can be used. In this case the<br />
emitter <strong>antenna</strong> has to be supplied by a dc voltage U of up to 30 V. The detector <strong>antenna</strong> rectifies the<br />
<strong>THz</strong> signal like in a lock-in system <strong>using</strong> the delay line for adjusting the optical reference signal. The<br />
maximum <strong>antenna</strong> output voltage is in the region of ~ 10 mV and the current ~ 1 nA. In this case a low<br />
drift dc current amplifier is needed to increase the signal level for registr<strong>at</strong>ion.<br />
6. Time-domain measurements<br />
<strong>THz</strong> detector signal <strong>at</strong> 10 mW optical pulse<br />
<strong>THz</strong> pulse, measured by B. Pradarutti, Fraunhofer-Institut Angewandte Optik und Feinmechanik, Jena,<br />
Germany<br />
<strong>BATOP</strong> <strong>GmbH</strong><br />
Wildenbruchstraße 15<br />
D-07745 Jena<br />
Tel: +49 3641 634009 - 0<br />
Fax: +49 3641 634009 - 20<br />
E-mail: info@b<strong>at</strong>op.de<br />
Deutsche Bank Jena<br />
Bank Code: 82070024<br />
Account No: 3922655<br />
Germany IBAN: DE49 8207 0024 0392 2655 00<br />
VAT Reg. No: DE 813698804<br />
Tax Acc. No: 161/106/02514<br />
Local Court Jena HRB 112769
10/14 Instruction manual PCA-44-06-10-800-x<br />
7. Photomixing measurements<br />
The <strong>THz</strong> <strong>photomixing</strong> measurements have been done <strong>at</strong> the Institute of Applied Physics, Technische<br />
Universität Darmstadt by Dominik Blömer in the group of Prof. Wolfgang Elsäßer.<br />
Photomixing setup<br />
The setup for the measurement of the emitted <strong>THz</strong> power is shown in the figure below. The dipole<br />
<strong>antenna</strong> was optically excited by a semiconductor laser based dual-wavelength external cavity source<br />
(2λ-ECDL) with a laser chip from Dr. Andreas Klehr und Dr. Goetz Erbert from Ferdinand-Braun-Institut<br />
fuer Hochfrequenztechnik (FBH) Berlin. The laser power can be adjusted <strong>using</strong> a λ/2-pl<strong>at</strong>e together<br />
with a polarizer (P). An optical spectrum analyzer (OSA) and a Fabry-Perot-Interferometer (FPI) have<br />
been used for the characteriz<strong>at</strong>ion of the laser radi<strong>at</strong>ion. The laser beam with a mean wavelength of ~<br />
830 nm was focussed via a microscope objective (10x, NA 0.16) on the gap of the <strong>photoconductive</strong><br />
<strong>antenna</strong>. The emitted <strong>THz</strong> power was directed with two off-axis parabolic mirrors (PM) onto a liquid<br />
helium cooled Si-bolometer (B).<br />
The bolometer does not give a calibr<strong>at</strong>ed signal, but the <strong>THz</strong> signal level is very low in the region of<br />
some 100 pW.<br />
<strong>BATOP</strong> <strong>GmbH</strong><br />
Wildenbruchstraße 15<br />
D-07745 Jena<br />
Tel: +49 3641 634009 - 0<br />
Fax: +49 3641 634009 - 20<br />
E-mail: info@b<strong>at</strong>op.de<br />
Deutsche Bank Jena<br />
Bank Code: 82070024<br />
Account No: 3922655<br />
Germany IBAN: DE49 8207 0024 0392 2655 00<br />
VAT Reg. No: DE 813698804<br />
Tax Acc. No: 161/106/02514<br />
Local Court Jena HRB 112769
11/14 Instruction manual PCA-44-06-10-800-x<br />
2λ-ECDL Bias voltage<br />
<strong>BATOP</strong> <strong>GmbH</strong><br />
Wildenbruchstraße 15<br />
D-07745 Jena<br />
ISO<br />
BS<br />
OSA<br />
FP<br />
λ/2 P<br />
Tel: +49 3641 634009 - 0<br />
Fax: +49 3641 634009 - 20<br />
E-mail: info@b<strong>at</strong>op.de<br />
V ,I<br />
b p<br />
Deutsche Bank Jena<br />
Bank Code: 82070024<br />
Account No: 3922655<br />
Germany IBAN: DE49 8207 0024 0392 2655 00<br />
S<br />
<strong>THz</strong><br />
Lock-In Amp.<br />
PM<br />
<strong>THz</strong> <strong>photomixing</strong> setup <strong>at</strong> the Darmstadt University of Technology<br />
The dependency of the emitted <strong>THz</strong> power P<strong>THz</strong> on the <strong>antenna</strong> bias voltage V is shown in the next<br />
figure. From the slope of the measured points a quadr<strong>at</strong>ic dependency of the <strong>THz</strong> power on the bias<br />
voltage can be deduced according the formula<br />
P<strong>THz</strong> ~ V 2<br />
This dependency can be expected, because it means a proportionality between the electric field<br />
strength in the <strong>antenna</strong> gap with the emitted <strong>THz</strong> field strength E<strong>THz</strong>, which is correl<strong>at</strong>ed with the <strong>THz</strong><br />
power P<strong>THz</strong> according to<br />
P<strong>THz</strong> ~ E<strong>THz</strong> 2<br />
<strong>THz</strong> signal (a.u.)<br />
1<br />
0,1<br />
PM<br />
10 15 20 25 30 35 40<br />
Bias Voltage (V)<br />
<strong>THz</strong> power as a function of the <strong>antenna</strong> bias voltage<br />
B<br />
VAT Reg. No: DE 813698804<br />
Tax Acc. No: 161/106/02514<br />
Local Court Jena HRB 112769
12/14 Instruction manual PCA-44-06-10-800-x<br />
Optical excit<strong>at</strong>ion power<br />
In the figure below the measured dependency of the emitted <strong>THz</strong> power P<strong>THz</strong> on the optical excit<strong>at</strong>ion<br />
power Popt is shown. The d<strong>at</strong>a points show a quadr<strong>at</strong>ic dependency according to the rel<strong>at</strong>ion<br />
2<br />
P<strong>THz</strong> ~ Popt<br />
This dependency can also be expected because of the following rel<strong>at</strong>ions between the optical power<br />
Popt, the excited free carrier density in the <strong>antenna</strong> gap ρ, the current density j, the emitted <strong>THz</strong> field<br />
strength E<strong>THz</strong> and the <strong>THz</strong> power P<strong>THz</strong><br />
<strong>BATOP</strong> <strong>GmbH</strong><br />
Wildenbruchstraße 15<br />
D-07745 Jena<br />
1/2<br />
Popt ~ ρ ~ j ~ E<strong>THz</strong> ~ P<strong>THz</strong><br />
<strong>THz</strong> signal (a.u.)<br />
10<br />
9<br />
8<br />
7<br />
6<br />
5<br />
4<br />
3<br />
2<br />
1<br />
10 15 20<br />
Tel: +49 3641 634009 - 0<br />
Fax: +49 3641 634009 - 20<br />
E-mail: info@b<strong>at</strong>op.de<br />
optical power (mW)<br />
<strong>THz</strong> power as a function of the optical excit<strong>at</strong>ion power<br />
Deutsche Bank Jena<br />
Bank Code: 82070024<br />
Account No: 3922655<br />
Germany IBAN: DE49 8207 0024 0392 2655 00<br />
VAT Reg. No: DE 813698804<br />
Tax Acc. No: 161/106/02514<br />
Local Court Jena HRB 112769
13/14 Instruction manual PCA-44-06-10-800-x<br />
Difference frequency<br />
The measured influence of the difference frequency f on the emitted <strong>THz</strong> power P<strong>THz</strong> is shown below. A<br />
resonance peak <strong>at</strong> f = 1.4 <strong>THz</strong> can be seen. The expected resonance frequency fres of a dipole <strong>antenna</strong><br />
with a length l = λ/2 = 44 µm in a semiconductor environment with the refractive index n ~ 3.4 can be<br />
estim<strong>at</strong>ed <strong>using</strong> the following rel<strong>at</strong>ion:<br />
<strong>THz</strong> signal (a.u.)<br />
f res<br />
10<br />
1<br />
0,1<br />
<strong>BATOP</strong> <strong>GmbH</strong><br />
Wildenbruchstraße 15<br />
D-07745 Jena<br />
c c<br />
= = =<br />
n ⋅ λ 2 ⋅n<br />
⋅l<br />
0,6 0,8 1,0 1,2 1,4 1,6 1,8 2,0 2,2 2,4 2,6 2,8<br />
Tel: +49 3641 634009 - 0<br />
Fax: +49 3641 634009 - 20<br />
E-mail: info@b<strong>at</strong>op.de<br />
Frequency (<strong>THz</strong>)<br />
<strong>THz</strong> power as a function of the difference frequency<br />
Deutsche Bank Jena<br />
Bank Code: 82070024<br />
Account No: 3922655<br />
Germany IBAN: DE49 8207 0024 0392 2655 00<br />
VAT Reg. No: DE 813698804<br />
Tax Acc. No: 161/106/02514<br />
Local Court Jena HRB 112769
14/14 Instruction manual PCA-44-06-10-800-x<br />
8. Order inform<strong>at</strong>ion<br />
PCA-44-06-10-800-x Photoconductive <strong>antenna</strong><br />
<strong>BATOP</strong> <strong>GmbH</strong><br />
Wildenbruchstraße 15<br />
D-07745 Jena<br />
length l = 44 µm<br />
gap g = 6 µm<br />
width w = 10 µm<br />
laser wavelength λ = 800 nm<br />
(500 nm … 850 nm)<br />
x denotes the type of mounting as follows:<br />
x = 0 unmounted chip 2 mm x 2 mm with bond contact pads 300 µm x 650 µm<br />
x = h mounted on an Al disc with 25.4 mm ∅ and hyperhemispherical silicon<br />
substr<strong>at</strong>e lens, 1m coaxial cable with SMA connector<br />
Tel: +49 3641 634009 - 0<br />
Fax: +49 3641 634009 - 20<br />
E-mail: info@b<strong>at</strong>op.de<br />
Deutsche Bank Jena<br />
Bank Code: 82070024<br />
Account No: 3922655<br />
Germany IBAN: DE49 8207 0024 0392 2655 00<br />
w<br />
g<br />
VAT Reg. No: DE 813698804<br />
Tax Acc. No: 161/106/02514<br />
Local Court Jena HRB 112769<br />
l