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1/14 Instruction manual PCA-44-06-10-800-x<br />

<strong>BATOP</strong> <strong>GmbH</strong><br />

Wildenbruchstraße 15<br />

D-07745 Jena<br />

Instruction manual and d<strong>at</strong>a sheet PCA-44-06-10-800-x<br />

Photoconductive <strong>THz</strong> <strong>antenna</strong> for laser excit<strong>at</strong>ion wavelengths λ ~ 500 nm … 850 nm<br />

PCA – Photocconductive Antenna<br />

Tel: +49 3641 634009 - 0<br />

Fax: +49 3641 634009 - 20<br />

E-mail: info@b<strong>at</strong>op.de<br />

http://www.b<strong>at</strong>op.de/<br />

PCA-44-06-10-800-0 - unmounted <strong>antenna</strong> chip 2 mm x 2 mm with 4 bond contact pads<br />

PCA-44-06-10-800-h - mounted <strong>antenna</strong> on hyperhemispherical silicon substr<strong>at</strong>e lens<br />

Table of contents:<br />

1. PCA applic<strong>at</strong>ions .............................................................................................................2<br />

2. Antenna design................................................................................................................2<br />

3. Antenna parameters ........................................................................................................3<br />

4. Mounted PCA on hyperhemispherical silicon substr<strong>at</strong>e lens...........................................5<br />

5. Instructions for use of the PCA-44-06-10-800-h..............................................................7<br />

6. Time-domain measurements...........................................................................................9<br />

7. Photomixing measurements ..........................................................................................10<br />

8. Order inform<strong>at</strong>ion...........................................................................................................14<br />

Deutsche Bank Jena<br />

Bank Code: 82070024<br />

Account No: 3922655<br />

Germany IBAN: DE49 8207 0024 0392 2655 00<br />

VAT Reg. No: DE 813698804<br />

Tax Acc. No: 161/106/02514<br />

Local Court Jena HRB 112769


2/14 Instruction manual PCA-44-06-10-800-x<br />

1. PCA applic<strong>at</strong>ions<br />

The PCA can be used as terahertz (<strong>THz</strong>) emitter or detector in pulsed laser g<strong>at</strong>ed broadband <strong>THz</strong><br />

measurement systems for time-domain spectroscopy and as <strong>photomixing</strong> emitter or detector in tunable<br />

cw <strong>THz</strong> measurement systems in the frequency region from 0.1 to 3 <strong>THz</strong>.<br />

Main PCA d<strong>at</strong>a<br />

200<br />

2. Antenna design<br />

300<br />

PCA<br />

44-06-10<br />

001<br />

2000<br />

<strong>BATOP</strong> <strong>GmbH</strong><br />

Wildenbruchstraße 15<br />

D-07745 Jena<br />

• Laser excit<strong>at</strong>ion wavelength λ ~ 800 nm<br />

• Antenna resonance frequency 1 <strong>THz</strong><br />

350 300<br />

2000<br />

all dimensions in micrometers<br />

Photo PCA 44-06-10 (survey) Photo PCA 44-06-100 Photo PCA 44-06-10 (detail)<br />

Tel: +49 3641 634009 - 0<br />

Fax: +49 3641 634009 - 20<br />

E-mail: info@b<strong>at</strong>op.de<br />

Dielectric cover<br />

Deutsche Bank Jena<br />

Bank Code: 82070024<br />

Account No: 3922655<br />

Germany IBAN: DE49 8207 0024 0392 2655 00<br />

10<br />

100<br />

6<br />

44<br />

VAT Reg. No: DE 813698804<br />

Tax Acc. No: 161/106/02514<br />

Local Court Jena HRB 112769


3/14 Instruction manual PCA-44-06-10-800-x<br />

3. Antenna parameters<br />

Electrical parameters minimum r<strong>at</strong>ings standard maximum r<strong>at</strong>ings<br />

Dark resistance 20 MΩ 25 MΩ 30 MΩ<br />

Dark current @ 10 V 300 nA 400 nA 500 nA<br />

Voltage 20 V 30V<br />

Dark current voltage characteristic <strong>at</strong> T = 300 K<br />

Current (μA)<br />

<strong>BATOP</strong> <strong>GmbH</strong><br />

Wildenbruchstraße 15<br />

D-07745 Jena<br />

2,0<br />

1,5<br />

1,0<br />

0,5<br />

PCA 44-06-10<br />

JAM 373<br />

0,0<br />

0 10 20 30 40 50<br />

Tel: +49 3641 634009 - 0<br />

Fax: +49 3641 634009 - 20<br />

E-mail: info@b<strong>at</strong>op.de<br />

Voltage (V)<br />

Optical excit<strong>at</strong>ion parameters minimum r<strong>at</strong>ings standard maximum r<strong>at</strong>ings<br />

Excit<strong>at</strong>ion laser wavelength 500 nm 800 nm 850 nm<br />

Optical reflectance @ 1040 nm 7 % @ 500 nm 5 % @ 800 nm 7 % @ 850 nm<br />

Optical mean power 30 mW 80 mW<br />

Optical mean power density 100 kW/cm 2<br />

Carrier recovery time 400 fs<br />

Deutsche Bank Jena<br />

Bank Code: 82070024<br />

Account No: 3922655<br />

Germany IBAN: DE49 8207 0024 0392 2655 00<br />

200 kW/cm 2<br />

VAT Reg. No: DE 813698804<br />

Tax Acc. No: 161/106/02514<br />

Local Court Jena HRB 112769


4/14 Instruction manual PCA-44-06-10-800-x<br />

Spectral reflectance<br />

Illumin<strong>at</strong>ion dependent resistance R<br />

<strong>BATOP</strong> <strong>GmbH</strong><br />

Wildenbruchstraße 15<br />

D-07745 Jena<br />

Reflection (%)<br />

25<br />

20<br />

15<br />

10<br />

5<br />

0<br />

400 500 600 700 800 900 1000 1100<br />

Wavelength (nm)<br />

GaAs 0° + 0,166Si + 0,697Ta @ 650nm<br />

Tel: +49 3641 634009 - 0<br />

Fax: +49 3641 634009 - 20<br />

E-mail: info@b<strong>at</strong>op.de<br />

Deutsche Bank Jena<br />

Bank Code: 82070024<br />

Account No: 3922655<br />

Germany IBAN: DE49 8207 0024 0392 2655 00<br />

VAT Reg. No: DE 813698804<br />

Tax Acc. No: 161/106/02514<br />

Local Court Jena HRB 112769


5/14 Instruction manual PCA-44-06-10-800-x<br />

4. Mounted PCA on hyperhemispherical silicon substr<strong>at</strong>e lens<br />

Photoconductive <strong>antenna</strong> substr<strong>at</strong>e semi-insul<strong>at</strong>ing GaAs<br />

<strong>BATOP</strong> <strong>GmbH</strong><br />

Wildenbruchstraße 15<br />

D-07745 Jena<br />

chip area 2 mm x 2mm<br />

thickness t 650 µm<br />

Hyperhemispherical lens m<strong>at</strong>erial undoped HRFZ-silicon,<br />

specific resistance ρ >10 kΩcm<br />

refractive index n 3.4<br />

diameter 12 mm<br />

height h 7.1 mm<br />

distance d 7.7 mm<br />

Terahertz beam collection angle α 57°<br />

β<br />

divergence angle ß 15°<br />

virtual focus length L 26.4 mm<br />

Tel: +49 3641 634009 - 0<br />

Fax: +49 3641 634009 - 20<br />

E-mail: info@b<strong>at</strong>op.de<br />

PCA<br />

hyperhemispherical Si lens<br />

Deutsche Bank Jena<br />

Bank Code: 82070024<br />

Account No: 3922655<br />

Germany IBAN: DE49 8207 0024 0392 2655 00<br />

L<br />

t<br />

d<br />

h<br />

α<br />

VAT Reg. No: DE 813698804<br />

Tax Acc. No: 161/106/02514<br />

Local Court Jena HRB 112769


6/14 Instruction manual PCA-44-06-10-800-x<br />

Aluminum mount 25.4 mm diameter, 6 mm thick<br />

Coaxial cable type RG178 B/U, impedance 50Ω, capacitance 96pF/m, 1 m long<br />

Connector type BNC<br />

• The PCA chip is optically adjusted and glued on the hyperhemispherical silicon lens with a thermal<br />

conducting glue.<br />

• The silicon lens is fixed on the aluminum mount with a thermal conducting glue.<br />

• The two <strong>antenna</strong> contacts are wire bonded on a printed circuit board, which provides the<br />

connection to a 1m long coaxial cable with BNC or SMA connector<br />

• A central hole in the aluminum mount allows the Terahertz radi<strong>at</strong>ion to escape from the<br />

hyperhemispherical silicon lens<br />

PCA with hyperhemispherical silicon lens, coaxial cable RG 178 and BNC connector<br />

Front view on mounted PCA (laser side) Back view on mounted PCA (<strong>THz</strong> side)<br />

<strong>BATOP</strong> <strong>GmbH</strong><br />

Wildenbruchstraße 15<br />

D-07745 Jena<br />

Tel: +49 3641 634009 - 0<br />

Fax: +49 3641 634009 - 20<br />

E-mail: info@b<strong>at</strong>op.de<br />

Deutsche Bank Jena<br />

Bank Code: 82070024<br />

Account No: 3922655<br />

Germany IBAN: DE49 8207 0024 0392 2655 00<br />

VAT Reg. No: DE 813698804<br />

Tax Acc. No: 161/106/02514<br />

Local Court Jena HRB 112769


7/14 Instruction manual PCA-44-06-10-800-x<br />

5. Instructions for use of the PCA-44-06-10-800-h<br />

The <strong>antenna</strong> can be used as terahertz emitter or detector in pulsed laser g<strong>at</strong>ed broadband <strong>THz</strong><br />

measurement systems for time-domain spectroscopy and as <strong>photomixing</strong> emitter or detector in tunable<br />

cw <strong>THz</strong> measurement systems in the frequency region from 0.1 to 3 <strong>THz</strong> (see schem<strong>at</strong>ics below).<br />

Schem<strong>at</strong>ic of a time-domain spectroscopy setup<br />

Photomixing setup<br />

<strong>BATOP</strong> <strong>GmbH</strong><br />

Wildenbruchstraße 15<br />

D-07745 Jena<br />

Tel: +49 3641 634009 - 0<br />

Fax: +49 3641 634009 - 20<br />

E-mail: info@b<strong>at</strong>op.de<br />

Deutsche Bank Jena<br />

Bank Code: 82070024<br />

Account No: 3922655<br />

Germany IBAN: DE49 8207 0024 0392 2655 00<br />

VAT Reg. No: DE 813698804<br />

Tax Acc. No: 161/106/02514<br />

Local Court Jena HRB 112769


8/14 Instruction manual PCA-44-06-10-800-x<br />

Emitter:<br />

The pulsed laser beam (in case of time domain spectroscopy) or the mixed cw laser beam (in case of<br />

cw <strong>THz</strong> emitter) has to be focussed onto the <strong>antenna</strong> gap <strong>using</strong> an appropri<strong>at</strong>e lens or objective with a<br />

beam diameter of about 6 µm to bridge the <strong>antenna</strong> gap with photo-excited carriers within the<br />

semiconductor. At the same time a voltage U of ~ 20 V (maximum 30 V peak voltage) has to be<br />

supplied on the gap by connecting the BNC connector cable to a voltage source. The recommended<br />

optical mean laser power Popt is 30 mW (maximum 80 mW).<br />

Receiver:<br />

The pulsed laser beam (in case of time domain spectroscopy) or the mixed cw laser beam (in case of<br />

cw <strong>THz</strong> emitter) has to be focussed onto the <strong>antenna</strong> gap <strong>using</strong> an appropri<strong>at</strong>e lens or objective with a<br />

beam diameter of about 6 µm to bridge the <strong>antenna</strong> gap with photo-excited carriers within the<br />

semiconductor. The phase of the laser beam with respect to the beam on the emitter site has to be<br />

adjusted by <strong>using</strong> of an optical delay line in such a way, th<strong>at</strong> the measured value of the <strong>THz</strong> field on<br />

the <strong>antenna</strong> meets a maximum of the optical beam. By changing the phase difference between the<br />

emitter and receiver <strong>antenna</strong> the time-dependent shape of the <strong>THz</strong> field can be measured.<br />

The cable with the BNC connector must be connected with a sensitive electronic current amplifier.<br />

Attention: Please be sure, th<strong>at</strong> the foc<strong>using</strong> lens or the lens mounting parts does not touch the<br />

<strong>antenna</strong> chip or the tiny gold contact wires between the <strong>antenna</strong> chip and the PCB. See figure “front<br />

view on mounted PCA (laser side)” above.<br />

Lock-in detection<br />

Because of the very small detector signal a lock-in detection scheme is recommended. The following<br />

two possibilities for lock-in detection can be used:<br />

• An optical chopper can be used in front of the emitter <strong>antenna</strong> to chop the optical beam with a<br />

frequency ~ 1 kHz. The result is a chopped emitted <strong>THz</strong> signal, which meets the detector<br />

<strong>antenna</strong>. The output of the detector <strong>antenna</strong> is than a chopped current, which can be amplified<br />

<strong>using</strong> an ac amplifier and rectified <strong>using</strong> a standard lock-in system. The disadvantage of this<br />

system is the loss of 50 % of the optical excit<strong>at</strong>ion power on the emitter <strong>antenna</strong>.<br />

• A square wave voltage gener<strong>at</strong>or with an output voltage U of maximum +/- 30 V and a<br />

frequency of some kHz can be used as supply for the emitter <strong>antenna</strong>. The result is an emitted<br />

altern<strong>at</strong>ing <strong>THz</strong> signal, which meets the detector <strong>antenna</strong>. The output of the detector <strong>antenna</strong><br />

is than an altern<strong>at</strong>ing current, which can be amplified <strong>using</strong> an ac amplifier and rectified <strong>using</strong> a<br />

standard lock-in system. This setup is shown in the figures above.<br />

<strong>BATOP</strong> <strong>GmbH</strong><br />

Wildenbruchstraße 15<br />

D-07745 Jena<br />

Tel: +49 3641 634009 - 0<br />

Fax: +49 3641 634009 - 20<br />

E-mail: info@b<strong>at</strong>op.de<br />

Deutsche Bank Jena<br />

Bank Code: 82070024<br />

Account No: 3922655<br />

Germany IBAN: DE49 8207 0024 0392 2655 00<br />

VAT Reg. No: DE 813698804<br />

Tax Acc. No: 161/106/02514<br />

Local Court Jena HRB 112769


9/14 Instruction manual PCA-44-06-10-800-x<br />

Direct voltage detection<br />

If the <strong>THz</strong> signal is large enough, a direct dc voltage detection scheme can be used. In this case the<br />

emitter <strong>antenna</strong> has to be supplied by a dc voltage U of up to 30 V. The detector <strong>antenna</strong> rectifies the<br />

<strong>THz</strong> signal like in a lock-in system <strong>using</strong> the delay line for adjusting the optical reference signal. The<br />

maximum <strong>antenna</strong> output voltage is in the region of ~ 10 mV and the current ~ 1 nA. In this case a low<br />

drift dc current amplifier is needed to increase the signal level for registr<strong>at</strong>ion.<br />

6. Time-domain measurements<br />

<strong>THz</strong> detector signal <strong>at</strong> 10 mW optical pulse<br />

<strong>THz</strong> pulse, measured by B. Pradarutti, Fraunhofer-Institut Angewandte Optik und Feinmechanik, Jena,<br />

Germany<br />

<strong>BATOP</strong> <strong>GmbH</strong><br />

Wildenbruchstraße 15<br />

D-07745 Jena<br />

Tel: +49 3641 634009 - 0<br />

Fax: +49 3641 634009 - 20<br />

E-mail: info@b<strong>at</strong>op.de<br />

Deutsche Bank Jena<br />

Bank Code: 82070024<br />

Account No: 3922655<br />

Germany IBAN: DE49 8207 0024 0392 2655 00<br />

VAT Reg. No: DE 813698804<br />

Tax Acc. No: 161/106/02514<br />

Local Court Jena HRB 112769


10/14 Instruction manual PCA-44-06-10-800-x<br />

7. Photomixing measurements<br />

The <strong>THz</strong> <strong>photomixing</strong> measurements have been done <strong>at</strong> the Institute of Applied Physics, Technische<br />

Universität Darmstadt by Dominik Blömer in the group of Prof. Wolfgang Elsäßer.<br />

Photomixing setup<br />

The setup for the measurement of the emitted <strong>THz</strong> power is shown in the figure below. The dipole<br />

<strong>antenna</strong> was optically excited by a semiconductor laser based dual-wavelength external cavity source<br />

(2λ-ECDL) with a laser chip from Dr. Andreas Klehr und Dr. Goetz Erbert from Ferdinand-Braun-Institut<br />

fuer Hochfrequenztechnik (FBH) Berlin. The laser power can be adjusted <strong>using</strong> a λ/2-pl<strong>at</strong>e together<br />

with a polarizer (P). An optical spectrum analyzer (OSA) and a Fabry-Perot-Interferometer (FPI) have<br />

been used for the characteriz<strong>at</strong>ion of the laser radi<strong>at</strong>ion. The laser beam with a mean wavelength of ~<br />

830 nm was focussed via a microscope objective (10x, NA 0.16) on the gap of the <strong>photoconductive</strong><br />

<strong>antenna</strong>. The emitted <strong>THz</strong> power was directed with two off-axis parabolic mirrors (PM) onto a liquid<br />

helium cooled Si-bolometer (B).<br />

The bolometer does not give a calibr<strong>at</strong>ed signal, but the <strong>THz</strong> signal level is very low in the region of<br />

some 100 pW.<br />

<strong>BATOP</strong> <strong>GmbH</strong><br />

Wildenbruchstraße 15<br />

D-07745 Jena<br />

Tel: +49 3641 634009 - 0<br />

Fax: +49 3641 634009 - 20<br />

E-mail: info@b<strong>at</strong>op.de<br />

Deutsche Bank Jena<br />

Bank Code: 82070024<br />

Account No: 3922655<br />

Germany IBAN: DE49 8207 0024 0392 2655 00<br />

VAT Reg. No: DE 813698804<br />

Tax Acc. No: 161/106/02514<br />

Local Court Jena HRB 112769


11/14 Instruction manual PCA-44-06-10-800-x<br />

2λ-ECDL Bias voltage<br />

<strong>BATOP</strong> <strong>GmbH</strong><br />

Wildenbruchstraße 15<br />

D-07745 Jena<br />

ISO<br />

BS<br />

OSA<br />

FP<br />

λ/2 P<br />

Tel: +49 3641 634009 - 0<br />

Fax: +49 3641 634009 - 20<br />

E-mail: info@b<strong>at</strong>op.de<br />

V ,I<br />

b p<br />

Deutsche Bank Jena<br />

Bank Code: 82070024<br />

Account No: 3922655<br />

Germany IBAN: DE49 8207 0024 0392 2655 00<br />

S<br />

<strong>THz</strong><br />

Lock-In Amp.<br />

PM<br />

<strong>THz</strong> <strong>photomixing</strong> setup <strong>at</strong> the Darmstadt University of Technology<br />

The dependency of the emitted <strong>THz</strong> power P<strong>THz</strong> on the <strong>antenna</strong> bias voltage V is shown in the next<br />

figure. From the slope of the measured points a quadr<strong>at</strong>ic dependency of the <strong>THz</strong> power on the bias<br />

voltage can be deduced according the formula<br />

P<strong>THz</strong> ~ V 2<br />

This dependency can be expected, because it means a proportionality between the electric field<br />

strength in the <strong>antenna</strong> gap with the emitted <strong>THz</strong> field strength E<strong>THz</strong>, which is correl<strong>at</strong>ed with the <strong>THz</strong><br />

power P<strong>THz</strong> according to<br />

P<strong>THz</strong> ~ E<strong>THz</strong> 2<br />

<strong>THz</strong> signal (a.u.)<br />

1<br />

0,1<br />

PM<br />

10 15 20 25 30 35 40<br />

Bias Voltage (V)<br />

<strong>THz</strong> power as a function of the <strong>antenna</strong> bias voltage<br />

B<br />

VAT Reg. No: DE 813698804<br />

Tax Acc. No: 161/106/02514<br />

Local Court Jena HRB 112769


12/14 Instruction manual PCA-44-06-10-800-x<br />

Optical excit<strong>at</strong>ion power<br />

In the figure below the measured dependency of the emitted <strong>THz</strong> power P<strong>THz</strong> on the optical excit<strong>at</strong>ion<br />

power Popt is shown. The d<strong>at</strong>a points show a quadr<strong>at</strong>ic dependency according to the rel<strong>at</strong>ion<br />

2<br />

P<strong>THz</strong> ~ Popt<br />

This dependency can also be expected because of the following rel<strong>at</strong>ions between the optical power<br />

Popt, the excited free carrier density in the <strong>antenna</strong> gap ρ, the current density j, the emitted <strong>THz</strong> field<br />

strength E<strong>THz</strong> and the <strong>THz</strong> power P<strong>THz</strong><br />

<strong>BATOP</strong> <strong>GmbH</strong><br />

Wildenbruchstraße 15<br />

D-07745 Jena<br />

1/2<br />

Popt ~ ρ ~ j ~ E<strong>THz</strong> ~ P<strong>THz</strong><br />

<strong>THz</strong> signal (a.u.)<br />

10<br />

9<br />

8<br />

7<br />

6<br />

5<br />

4<br />

3<br />

2<br />

1<br />

10 15 20<br />

Tel: +49 3641 634009 - 0<br />

Fax: +49 3641 634009 - 20<br />

E-mail: info@b<strong>at</strong>op.de<br />

optical power (mW)<br />

<strong>THz</strong> power as a function of the optical excit<strong>at</strong>ion power<br />

Deutsche Bank Jena<br />

Bank Code: 82070024<br />

Account No: 3922655<br />

Germany IBAN: DE49 8207 0024 0392 2655 00<br />

VAT Reg. No: DE 813698804<br />

Tax Acc. No: 161/106/02514<br />

Local Court Jena HRB 112769


13/14 Instruction manual PCA-44-06-10-800-x<br />

Difference frequency<br />

The measured influence of the difference frequency f on the emitted <strong>THz</strong> power P<strong>THz</strong> is shown below. A<br />

resonance peak <strong>at</strong> f = 1.4 <strong>THz</strong> can be seen. The expected resonance frequency fres of a dipole <strong>antenna</strong><br />

with a length l = λ/2 = 44 µm in a semiconductor environment with the refractive index n ~ 3.4 can be<br />

estim<strong>at</strong>ed <strong>using</strong> the following rel<strong>at</strong>ion:<br />

<strong>THz</strong> signal (a.u.)<br />

f res<br />

10<br />

1<br />

0,1<br />

<strong>BATOP</strong> <strong>GmbH</strong><br />

Wildenbruchstraße 15<br />

D-07745 Jena<br />

c c<br />

= = =<br />

n ⋅ λ 2 ⋅n<br />

⋅l<br />

0,6 0,8 1,0 1,2 1,4 1,6 1,8 2,0 2,2 2,4 2,6 2,8<br />

Tel: +49 3641 634009 - 0<br />

Fax: +49 3641 634009 - 20<br />

E-mail: info@b<strong>at</strong>op.de<br />

Frequency (<strong>THz</strong>)<br />

<strong>THz</strong> power as a function of the difference frequency<br />

Deutsche Bank Jena<br />

Bank Code: 82070024<br />

Account No: 3922655<br />

Germany IBAN: DE49 8207 0024 0392 2655 00<br />

VAT Reg. No: DE 813698804<br />

Tax Acc. No: 161/106/02514<br />

Local Court Jena HRB 112769


14/14 Instruction manual PCA-44-06-10-800-x<br />

8. Order inform<strong>at</strong>ion<br />

PCA-44-06-10-800-x Photoconductive <strong>antenna</strong><br />

<strong>BATOP</strong> <strong>GmbH</strong><br />

Wildenbruchstraße 15<br />

D-07745 Jena<br />

length l = 44 µm<br />

gap g = 6 µm<br />

width w = 10 µm<br />

laser wavelength λ = 800 nm<br />

(500 nm … 850 nm)<br />

x denotes the type of mounting as follows:<br />

x = 0 unmounted chip 2 mm x 2 mm with bond contact pads 300 µm x 650 µm<br />

x = h mounted on an Al disc with 25.4 mm ∅ and hyperhemispherical silicon<br />

substr<strong>at</strong>e lens, 1m coaxial cable with SMA connector<br />

Tel: +49 3641 634009 - 0<br />

Fax: +49 3641 634009 - 20<br />

E-mail: info@b<strong>at</strong>op.de<br />

Deutsche Bank Jena<br />

Bank Code: 82070024<br />

Account No: 3922655<br />

Germany IBAN: DE49 8207 0024 0392 2655 00<br />

w<br />

g<br />

VAT Reg. No: DE 813698804<br />

Tax Acc. No: 161/106/02514<br />

Local Court Jena HRB 112769<br />

l

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